Automated Calibration System for Very Low Pressure
Force balanced piston gauges operating on the principle of a piston-cylinder combined with a force balanced load cell.
Traceable automated calibration of ranges as low as 13 Pa (100 m Torr).
- Covers the range of 0 to 15 kPa (113 Torr) in gauge, absolute differential and absolute modes.
- Resolution to 1 mPa (0.0075 mTorr, 0.000004 in. H2O).
- Measurement uncertainty to:± (5 mPa + 30 ppm of reading) in gauge and absolute differential
mode, ± (8 mPa + 30 ppm of reading) in absolute mode.
- Fully automated operation including pressure control and DUT data acquisition allows
multi-increment tests to be run unattended. Integrated thermal transpiration correction
available when needed.
